Requirements
Process Indicators
- Directional Tolerance < 0.5°
- Thickness/Diameter Tolerance ±0.10 mm
- Surface Flatness <(λ/2-λ/4)@632nm
- Wavefront Distortion <(1-2)λ@632nm
- Surface Quality 60/40
- Parallel 1ˊ
- Perpendicular 30ˊ
- Clear Aperture >90%
- Chamfer <0.2×45°